XRR of thin films
X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g / cm3), thickness (nm), and roughness (nm) values. For the film thickness measurements, typically the film thickness has to be below < 100 nm, and it has to be at least one order of magnitude larger than the roughness. For surface roughness measurements the thickness should often be < 250 nm. For density measurements, the film thickness can be even larger. Please note that the suitable thickness of the film depends on the sample. If you need help with the analysis, you can always contact our customer service!
More information about the method family:X-ray reflectivity (XRR)
- Suitable sample matrices
- Thin films, ALD samples
- Minimum sample amount
- Optimal 5 x 4 cm, minimum 2 x 2 cm
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Measurlabs validated method
- Device families
- Method expert
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