XRR of thin films

X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g / cm3), thickness (nm), and roughness (nm) values. For the film thickness measurements, typically the film thickness has to be below < 100 nm, and it has to be at least one order of magnitude larger than the roughness. For surface roughness measurements the thickness should often be < 250 nm. For density measurements, the film thickness can be even larger. Please note that the suitable thickness of the film depends on the sample. If you need help with the analysis, you can always contact our customer service!

Suitable sample matrices
Thin films, ALD samples
Minimum sample amount
Optimal 5 x 4 cm, minimum 2 x 2 cm
Typical turnaround time
3 weeks after receiving the samples
Quality system
Measurlabs validated method
Device families
Method expert
Shima Moosakhani
Shima Moosakhani

Interested in this measurement?

You can order this measurement via online checkout. Just fill in a few details below:

340 €
First sample: 340 €
Additional samples: 210 € per sample

Questions? We're happy to help.

Questions? We're happy to help.

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Results in four easy steps

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