XRR of thin films

X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g/cm3), thickness (nm), and roughness (nm) values.

For film thickness measurements, the thickness should generally be below 100 nm and at least one order of magnitude larger than the roughness. For surface roughness measurements, the thickness should preferably be < 250 nm. For density measurements, the film thickness can be larger.

Please note that the suitable thickness of the film depends on the sample. If you need more information on the analysis, you can always contact our experts.

Suitable sample matrices
Thin films, ALD samples, coatings, films
Required sample quantity
Optimal size 5 x 4 cm, minimum 2 x 2 cm
Typical turnaround time
2 weeks after receiving the samples
Available quality systems
Measurlabs validated method
Device types

Order this test online

First sample (Excl. VAT):
300 €
Additional samples (Excl. VAT):
250 €per sample
If you have a large number of samples, contact us for a possible discount.

Samples are entered during checkout.

Our experts review all orders to ensure the testing method is suitable for your needs and samples.

Large number of samples or specialized needs?

Questions? We're happy to help.

Questions? We're happy to help.

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Have questions or need help? Email us at or call +358 50 336 6128.