XRR of thin films

X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g/cm3), thickness (nm), and roughness (nm) values. For film thickness measurements, the thickness has to usually be below 100 nm and at least one order of magnitude larger than the roughness. For surface roughness measurements, the thickness should generally be < 250 nm. For density measurements, the film thickness can be even larger. Please note that the suitable thickness of the film depends on the sample. If you need help with the analysis, you can always contact our customer service.

Suitable sample matrices
Thin films, ALD samples
Minimum sample amount
Optimal size 5 x 4 cm, minimum 2 x 2 cm
Typical turnaround time
3 weeks after receiving the samples
Quality system
Measurlabs validated method
Device families
Method expert
Kia Bertula
Kia Bertula

Order this test online

First sample (VAT 0):
340 €
Additional samples (VAT 0):
210 €per sample
If you have a large number of samples, contact us for a possible discount.

Samples are entered during checkout.

Our experts review all orders to ensure the testing method is suitable for your needs and samples.

Questions? We're happy to help.

Questions? We're happy to help.

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