XRR of thin films
X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g/cm3), thickness (nm), and roughness (nm) values. For film thickness measurements, the thickness has to usually be below 100 nm and at least one order of magnitude larger than the roughness. For surface roughness measurements, the thickness should generally be < 250 nm. For density measurements, the film thickness can be even larger. Please note that the suitable thickness of the film depends on the sample. If you need help with the analysis, you can always contact our customer service.
More information about the method family:
X-ray diffraction (XRD)
Semiconductors
Surface testing- Suitable sample matrices
- Thin films, ALD samples
- Minimum sample amount
- Optimal size 5 x 4 cm, minimum 2 x 2 cm
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Measurlabs validated method
- Device families
- Method expert
Questions? We're happy to help.
Questions? We're happy to help.
Results in four easy steps
1
Select the tests you need
2
Get an order confirmation
3
Ship your samples to us
4
Receive your test report