XRR of thin films

X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g / cm3), thickness (nm), and roughness (nm) values. For the film thickness measurements, the film thickness has to be below 100 nm and it has to be at least one order of magnitude larger than the roughness. For density and surface roughness measurements, film thickness can be < 100 nm or > 100 nm.

Suitable sample matrices
Thin films, ALD samples
Minimum sample amount
Optimal 5 x 4 cm, minimum 2 x 2 cm
Typical turnaround time
4 weeks after receiving the samples
Quality system
Measurlabs validated method
Device families
Method expert
Kia Bertula
Kia Bertula
Price (VAT 0)
First sample: 613 €
Additional samples: 208 € per sample

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613 €(VAT 0)

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