XRR of thin films or coatings
X-Ray Reflectometry (XRR) analysis is used to measure the density, thickness, and roughness of films.
For film thickness measurements, the thickness should generally be below 300 nm (depending on the material) and the roughness should be low (<5 nm).
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More information about the method family:
X-ray diffraction (XRD)- Suitable sample matrices
- Thin films, ALD samples, coatings
- Required sample quantity
- Optimal size 5 x 4 cm, minimum 2 x 2 cm
- Typical turnaround time
- 2 weeks after receiving the samples
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Metals and mining
Polymers and plastics
Semiconductors
Physical and chemical properties
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