XRR of thin films

X-ray reflectometry (XRR) analysis of thin film samples. Results include density (g/cm³), thickness (nm), and roughness (nm) values.

For film thickness measurements, the thickness should generally be below 100 nm and at least one order of magnitude larger than the roughness. For surface roughness measurements, the thickness should preferably be < 250 nm. For density measurements, the film thickness can be larger.

Please note that the suitable thickness of the film depends on the sample. If you need more information on the analysis, you can always contact our experts.