AFM surface roughness measurement
In this analysis, the surface roughness value (RMS) of the sample is determined with atomic force microscopy (AFM).
Three measurement points from the sample are included in a typical analysis. The measurement area is 5 x 5 micrometers, if not agreed otherwise.
In addition to the RMS value, a 2D image, a 3D image, and raw data will be included in the test report.
More information about the method:
Atomic force microscopy (AFM)- Suitable sample matrices
- Smooth, hard surfaces, such as silicon wafers or glass.
- Required sample quantity
- 1 x 1 cm
- Typical turnaround time
- 2 – 3 weeks after receiving the samples
- Detection limit
- 0.1 nm
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Semiconductors
Microscopy
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