RBS measurement (Normal delivery)

Rutherford Backscattering Spectrometry (RBS) can be used to measure the composition of solid samples quantitatively and can be used for depth profiling.

RBS is used for the analysis of heavier elements and can be combined with ToF-ERDA when lighter elements also need to be analyzed.

Elements with similar mass can be difficult to differentiate.

This product is a slower delivery version. A faster delivery option is also available (see "RBS measurement (express delivery)").

Suitable sample matrices
Thin films, coatings, semiconductors, metals, solid materials
Required sample quantity
10x10-15x15 mm
Detection limit
0.1at.% (ppm for heavy elements)
Available quality systems
Measurlabs validated method
Device types

Pricing and online order

First sample (Excl. VAT):
550 €
Additional samples (Excl. VAT):
420 €per sample
Large batches of samples are eligible for discounts.

Samples are entered during checkout.

Our experts review all orders to ensure the testing method is suitable for your needs and samples.

Questions? We're happy to help.

Questions? We're happy to help.

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