RBS measurement (Normal delivery)
Rutherford Backscattering Spectrometry (RBS) can be used to measure the composition of solid samples quantitatively and can be used for depth profiling.
RBS is used for the analysis of heavier elements and can be combined with ToF-ERDA when lighter elements also need to be analyzed.
Elements with similar mass can be difficult to differentiate.
This product is a slower delivery version. A faster delivery option is also available (see "RBS measurement (express delivery)").
More information about the method:
RBS analysis- Suitable sample matrices
- Thin films, coatings, semiconductors, metals, solid materials
- Required sample quantity
- 10x10-15x15 mm
- Detection limit
- 0.1at.% (ppm for heavy elements)
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
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