RBS analysis

What is Rutherford backscattering spectrometry used for?

Rutherford backscattering spectrometry (RBS) is an ion beam technique used for characterizing thin films and studying solid surfaces. The technique provides quantitative information on the different elements present on the sample surface and as a function of depth. The maximum profiling depth of RBS is 1 micrometer.

Strengths and limitations

+ The main advantage of the RBS technique is its ability to provide depth profiles for multiple elements during a single measurement without reference standards.

+ Unlike many other thin film techniques, including SIMS and cross-section SEM-EDX, RBS is a nondestructive method when used for surface analysis.

- RBS is suitable for the analysis of heavy elements on a light substrate, but light elements on a heavy substrate cannot be detected.

How does RBS work?

Typically, RBS uses a high-energy beam of He²⁺ ions that is directed onto a sample surface. Some of the incoming ions are scattered elastically from the sample's atomic nuclei. These backscattered ions are detected, and the energy distributions and yield of ions at a given angle are measured. The detected energy is dependent on the mass of the target nucleus and the depth of the scattering event.

Need RBS analysis services?

Measurlabs provides RBS testing and complementary methods for accurate characterization of thin films and wafers. Even large sample batches are handled efficiently, with results delivered quickly and without compromising quality. More than 1,000 companies, including industry leaders such as Okmetic, rely on Measurlabs for precise analyses and dependable service. You can request a quote for your project using the form below.