ToF-ERDA measurement
Tof-ERDA measurement for thin films. Results include elemental composition (atomic-%), total content (1E15 at/cm2), and depth profiles (concentration as a function of depth) of the measured layer.
More information about the method family:
Time of flight elastic recoil detection analysis (ERDA)
Compositional analysis
Elemental analysis
Material testing
Surface testing- Suitable sample matrices
- Thin films, ALD samples
- Minimum sample amount
- Sample size: 10 x 10 mm – 15 x 15 mm
- Quality system
- Measurlabs validated method
- Device families
- Method expert
Interested in this measurement?
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Questions? We're happy to help.
Questions? We're happy to help.
Results in four easy steps
1
Select the tests you need
2
Get an order confirmation
3
Ship your samples to us
4
Receive your test report