ToF-ERDA measurement
This Tof-ERDA measurement for thin films will provide the following results:
- Elemental composition (atomic-%)
- Total content (1E15 at/cm2)
- Depth profiles (concentrations as a function of depth)
Tof-ERDA measurement is capable of detecting all elements and distinguishing between different isotopes of hydrogen.
More information about the method family:
ToF-ERDA (ERDA)- Suitable sample matrices
- Thin films, ALD samples
- Minimum sample amount
- Sample size: 10 x 10 mm – 15 x 15 mm
- Quality system
- Measurlabs validated method
- Device types
- Method expert
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Kia Bertula
Semiconductors
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