ToF-ERDA measurement

Tof-ERDA measurement for thin films. Results include elemental composition (atomic-%), total content (1E15 at/cm2), and depth profiles (concentration as a function of depth) of the measured layer.

Suitable sample matrices
Thin films, ALD samples
Minimum sample amount
Sample size: 10 x 10 mm – 15 x 15 mm
Quality system
Measurlabs validated method
Device families
Method expert
Kia Bertula
Kia Bertula

Interested in this measurement?

You can order this measurement via online checkout. Just fill in a few details below:

664 €
First sample: 664 €
Additional samples: 533 € per sample

Questions? We're happy to help.

Questions? We're happy to help.

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