ToF-ERDA measurement
This Tof-ERDA measurement for thin films will provide the following results: - Elemental composition (atomic-%) - Total content (1E15 at/cm2) - Depth profiles (concentrations as a function of depth) Tof-ERDA measurement is capable of detecting all elements and distinguishing between different isotopes of hydrogen.
More information about the method family:
ToF-ERDA (ERDA)
Semiconductors
Surface testing- Suitable sample matrices
- Thin films, ALD samples
- Minimum sample amount
- Sample size: 10 x 10 mm – 15 x 15 mm
- Quality system
- Measurlabs validated method
- Device families
- Method expert
Questions? We're happy to help.
Questions? We're happy to help.
Results in four easy steps
1
Select the tests you need
2
Get an order confirmation
3
Ship your samples to us
4
Receive your test report