ToF-ERDA measurement

This Tof-ERDA measurement for thin films will provide the following results:

- Elemental composition (atomic-%)

- Total content (1E15 at/cm2)

- Depth profiles (concentrations as a function of depth)

Tof-ERDA measurement is capable of detecting all elements and distinguishing between different isotopes of hydrogen.

Suitable sample matrices
Thin films, ALD samples
Minimum sample amount
Sample size: 10 x 10 mm – 15 x 15 mm
Quality system
Measurlabs validated method
Device types
Method expert
Kia Bertula

Order this test online

First sample (VAT 0):
664 €
Additional samples (VAT 0):
533 €per sample
If you have a large number of samples, contact us for a possible discount.

Samples are entered during checkout.

Our experts review all orders to ensure the testing method is suitable for your needs and samples.

Questions? We're happy to help.

Questions? We're happy to help.

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