ToF-ERDA measurement
Time-of-flight elastic recoil detection analysis (ToF-ERDA) can be used to measure thin films.
It can provide the elemental composition of the material and can be used for depth profiling.
Tof-ERDA is capable of detecting all elements and distinguishing between different isotopes of hydrogen.
More information about the method family:
ToF-ERDA (ERDA)- Suitable sample matrices
- Thin films
- Minimum sample amount
- Sample size: 10 x 10 mm – 15 x 15 mm
- Detection limit
- 0.1 - 0.5 at.% (ppm for H)
- Quality system
- Measurlabs validated method
- Device types
- Method expert
![Charlotte Zborowski]()
Charlotte Zborowski
Semiconductors
Surface testingLarge number of samples or specialized needs?
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