ToF-ERDA measurement (Normal delivery)
Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA) can be used to measure the composition of solid samples quantitatively.
It can be used for depth profiling.
Tof-ERDA is capable of detecting all elements and distinguishing between different isotopes of hydrogen. It is especially used for lighter elements due to its better detection limit for these.
Elements with similar mass can be difficult to differentiate by ToF-ERDA.
This product is a normal delivery version. A priority option is also available (see "ToF-ERDA measurement (Priority option)").
More information about the method:
ToF-ERDA- Suitable sample matrices
- Thin films, metals, solid materials
- Required sample quantity
- Optimal sample size: 10x10mm - max 15 x 15 mm, Roughness: < 10nm
- Detection limit
- 0.1 - 0.5 at.% (ppm for H)
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Chemicals
Semiconductors
Compositional analysis
Elements and ions
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