ToF-ERDA measurement

This Tof-ERDA measurement for thin films will provide the following results: - Elemental composition (atomic-%) - Total content (1E15 at/cm2) - Depth profiles (concentrations as a function of depth) Tof-ERDA measurement is capable of detecting all elements and distinguishing between different isotopes of hydrogen.

Suitable sample matrices
Thin films, ALD samples
Minimum sample amount
Sample size: 10 x 10 mm – 15 x 15 mm
Quality system
Measurlabs validated method
Device families
Method expert
Kia Bertula
Kia Bertula

Order this test online

First sample (VAT 0):
664 €
Additional samples (VAT 0):
533 €per sample
If you have a large number of samples, contact us for a possible discount.

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Our experts review all orders to ensure the testing method is suitable for your needs and samples.

Questions? We're happy to help.

Questions? We're happy to help.

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