LA-ICP-MS of thin film samples (70 elements)
Determination of metal concentrations on ALD thin films using LA-ICP-MS. The measurement includes the analysis of the following elements:
Ag, Al, As, Au, B, Ba, Be, Bi, Br, Ca, Cd, Ce, Co, Cr, Cs, Cu, Dy, Er, Eu Fe, Ga, Gd, Ge, Hf, Hg, Ho, I, In, Ir, K, La, Li, Lu, Mg, Mn, Mo, Na, Nb, Nd, Ni, Os, P, Pb, Pd, Pr, Pt, Rb, Re, Rh, Ru, Sb, Sc, Se, Sm, Sn, Sr, Ta, Tb, Te, Th, Ti, Tl, Tm, U, V, W, Y, Yb, Zn, and Zr.
Values will be reported in ppm (μg/g).
More information about the method family:LA-ICP-MS analysis (LA-ICP-MS)
- Suitable sample matrices
- Thin films, ALD samples
- Typical turnaround time
- 4 weeks after receiving the samples
- Quality system
- Accredited testing laboratory
- Device types