LA-ICP-MS of thin film samples (one element)
Determination of a metal concentration on an ALD thin film using LA-ICP-MS. The measurement includes the analysis of one element, which is selected upon odering.
Values will be reported in ppm ( μg/g).
More information about the method family:
LA-ICP-MS Analysis (LA-ICP-MS)- Suitable sample matrices
- Thin films, ALD samples
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Accredited testing laboratory
- Device types
- Method expert
![Hande Güneş]()
Hande Güneş
Semiconductors
Elements and ions
Surface testingLarge number of samples or specialized needs?
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