All thin film analyses from one place
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Compositional analysis
Ideally, the thin films used in applications such as covering circuit boards are made of only the desired elements and there are no impurities present. To monitor the amount of impurities there are very accurate surface testing techniques, such as SIMS, ToF-ERDA, XRR, XRF, EDX and MALDI-ToF available. Along with the elemental composition at the surface, the composition within the film and in the bulk can be determined, to follow for example concentration of oxygen, or any other element as a function of depth. In this way you get a graphical representation of how the elemental composition changes from the surface to the bulk.
VDP-ICP-MS analyses
We offer a large range of high quality vapour phase decomposition ICP-MS analyses for determining the metallic contaminants on the surface of silicon wafers and thin films. The analysis allows for quantification of contaminants at an ultra trace levels and is an excellent technique for quality control in the semiconductor industry.
Roughness testing
Roughness of the thin film coating can be determined visually by using SEM or to get actual numbers, including RMS roughness (or Rq), with AFM. The AFM method is super accurate and gives roughness values for very smooth surfaces such as polished silicon wafers.
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Thickness determination
Thin films are films that are less than 100 nm in thickness. Typical thin films are prepared by sputtering or atomic layer deposition (ALD), and require a substrate to support the film. The thickness of thin films can be measured using ellipsometry, XRR or electron microscopy.
Why choose Measurlabs?
Widest range of testing methods – get all your tests done in the same place.
Best laboratories – for every test, we have sourced the best lab for that particular method, which means that you get the most accurate results and the best price.
Personal service – get help from method experts if you are unsure about standards, your testing needs or sample suitability.
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Have questions or need help? Email us at info@measurlabs.com or call +358 50 336 6128.