TXRF measurement

Total reflection X-ray fluorescence (TXRF) allows for surface elemental composition measurement.

It is often used to map trace contaminations.

Detection limit: 109 – 1011 at/cm2

Depth resolution: about 3-9 nm (depending on the material)

Suitable sample matrices
Si wafer or films
Minimum sample amount
Full wafer up to 300mm
Typical turnaround time
3 weeks after receiving the samples
Quality system
Accredited testing laboratory
Device types
Method expert
Charlotte Zborowski

Questions? We're happy to help.

Questions? We're happy to help.

Ringing phone

Ask for an offer

Fill in the form, and we'll reply in one business day.

Answering the following questions helps us prepare an offer for you faster:

  • How many samples do you have and what is the sample material?
  • Do you have a recurring need for these tests? If yes, how often and for how many samples at a time?

Have questions or need help? Email us at or call +358 50 336 6128.