TXRF measurement
Total reflection X-ray fluorescence (TXRF) allows for surface elemental composition measurement.
It is often used to map trace contaminations.
Detection limit: 109 – 1011 at/cm2
Depth resolution: about 3-9 nm (depending on the material)
More information about the method family:
TXRF Analysis- Suitable sample matrices
- Si wafer or films
- Minimum sample amount
- Full wafer up to 300mm
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Accredited testing laboratory
- Device types
- Method expert
- Charlotte Zborowski
Questions? We're happy to help.
Questions? We're happy to help.
Ask for an offer
Fill in the form, and we'll reply in one business day.
Have questions or need help? Email us at info@measurlabs.com or call +358 50 336 6128.