ICP-MS for thin films on wafers

Determination of trace metal contamination in thin films on silicon wafers. Different methods can be used depending on the material and substrate.

Please, contact our expert to discuss the feasibility of the measurement for your matrix.

Suitable sample matrices
Thin film or coating on wafer
Required sample quantity
1 full wafer
Typical turnaround time
2 weeks after receiving the samples
Detection limit
Ppm - ppb
Available quality systems
Accredited testing laboratory
Device types

Questions? We're happy to help.

Questions? We're happy to help.

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  • How many samples do you have and what is the sample material?
  • Do you have a recurring need for these tests? If yes, how often and for how many samples at a time?

Have questions or need help? Email us at or call +358 50 336 6128.