BPSG analysis
Determination of B and P in Borophosphosilicate glass.
More information about the method family:
Vapour phase decomposition ICP-MS (VPD-ICP-MS)- Suitable sample matrices
- Solid
- Typical turnaround time
- 4 weeks after receiving the samples
- Detection limit
- Ppm - ppb
- Quality system
- Accredited testing laboratory
- Device types
- Method expert
![Charlotte Zborowski]()
Charlotte Zborowski
Semiconductors
Surface testingLarge number of samples or specialized needs?
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