Auger electron spectroscopy (AES)
Auger Electron Spectroscopy (AES) is used to analyze the elemental composition of materials.
AES is a surface-sensitive technique (3-9 nm) which is used for depth profiling, providing analysis of the elemental composition in depth. Secondary electron images can also be provided.
This is a very useful technique to measure patterns since it has a beam size which can go down to a few nm.
More information about the method:
Auger electron spectroscopy (AES)- Suitable sample matrices
- Solid, dry and conductive
- Required sample quantity
- 1x1 cm
- Typical turnaround time
- 2 – 3 weeks after receiving the samples
- Detection limit
- 0.1 - 1 at.%
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Chemicals
Metals and mining
Paper and board
Polymers and plastics
Semiconductors
Compositional analysis
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