XRR + GI-XRD of thin films
Grazing Incidence X-ray diffraction (GI-XRD) measurement of thin films + X-ray reflectometry (XRR) analysis of thin films.
Results include density (g/cm3), thickness (nm), and roughness (nm) values.
For XRR, the thickness should generally be below 100 nm and at least one order of magnitude larger than the roughness. For surface roughness measurements, the thickness should preferably be < 250 nm.
Please note that the suitable thickness of the film depends on the material. If you need more information on the analysis, you can always contact our experts.
More information about the method:
X-ray diffraction (XRD)Grazing incidence x-ray diffraction (GIXRD)- Suitable sample matrices
- Thin films
- Required sample quantity
- Optimal size: 5 x 4 cm, minimum: 2 x 2 cm
- Typical turnaround time
- 3 weeks after receiving the samples
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Semiconductors
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