ToF-ERDA measurement

Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA) is an elemental analysis technique used for quantitative analysis of solids. The method is often used for depth profiling of thin films and bulk samples.

Tof-ERDA is capable of detecting all elements and distinguishing between different isotopes of hydrogen. The technique is particularly useful when analyzing lighter elements due to its better detection limit.

Depth profiling can be done from a few nm down to 1 µm with detection limits in the 0.1 - 0.5 at.% range (ppm for H).

Suitable sample matrices
Thin films, metals, solid materials
Required sample quantity
Optimal sample size: 10x10mm - max 15 x 15 mm, Roughness: < 10nm
Typical turnaround time
2 – 4 weeks after receiving the samples
Detection limit
0.1 - 0.5 at.% (ppm for H)
Available quality systems
Measurlabs validated method
Device types

Pricing and online order

Price per sample (Excl. VAT):
530 €

We also charge a 97 € service fee per order.

Large batches of samples are eligible for discounts.

Samples are entered during checkout.

Our experts review all orders to ensure the testing method is suitable for your needs and samples.

Questions? We're happy to help.

Questions? We're happy to help.

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