ToF-ERDA measurement
Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA) is an elemental analysis technique used for quantitative analysis of solids. The method is often used for depth profiling of thin films and bulk samples.
Tof-ERDA is capable of detecting all elements and distinguishing between different isotopes of hydrogen. The technique is particularly useful when analyzing lighter elements due to its better detection limit.
Depth profiling can be done from a few nm down to 1 µm with detection limits in the 0.1 - 0.5 at.% range (ppm for H).
More information about the method:
ToF-ERDA- Suitable sample matrices
- Thin films, metals, solid materials
- Required sample quantity
- Optimal sample size: 10x10mm - max 15 x 15 mm, Roughness: < 10nm
- Typical turnaround time
- 2 – 4 weeks after receiving the samples
- Detection limit
- 0.1 - 0.5 at.% (ppm for H)
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
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