ToF-ERDA measurement
Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA) can be used to measure the composition of solid samples quantitatively. The method is often used for depth profiling.
Tof-ERDA is capable of detecting all elements and distinguishing between different isotopes of hydrogen. It is particularly useful when analyzing lighter elements due to its better detection limit for these.
Elements with similar mass can be difficult to differentiate by ToF-ERDA.
More information about the method:
ToF-ERDA- Suitable sample matrices
- Thin films, metals, solid materials
- Required sample quantity
- Optimal sample size: 10x10mm - max 15 x 15 mm, Roughness: < 10nm
- Typical turnaround time
- 2 – 4 weeks after receiving the samples
- Detection limit
- 0.1 - 0.5 at.% (ppm for H)
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Chemicals
Semiconductors
Compositional analysis
Elements and ions
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