LA-ICP-MS of thin film samples (standard elements)
Determination of metal concentrations on ALD thin films using LA-ICP-MS. The standard analysis package includes the quantification of the following elements:
Ca, Cr, Cu, Co, Er, Fe, Ge, Pb, Mn, Mo, Ni, K, Na, Sn, Ti, Ta, Zn, Bi, Au, Sn, V, Sr, and Y.
Values will be reported in ppm (μg/g).
More information about the method:
LA-ICP-MS analysis (LA-ICP-MS)- Suitable sample matrices
- Thin film, ALD samples
- Typical turnaround time
- 4 weeks after receiving the samples
- Available quality systems
- Accredited testing laboratory
- Device types
- Method expert
Semiconductors
Elements and ions
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