Si wafer organic contamination by ATD GC-MS

Automated thermal desorption gas chromatography-mass spectrometry (ATD-GC-MS) is a very sensitive method for wafer surface organic contamination analysis, providing low detection limits and a wide range of organic contaminants analysis capabilities.

The analysis can be done following SEMI MF 1982-1103 standard.

Suitable sample matrices
Si wafer
Required sample quantity
100mm to 300mm full wafer
Typical turnaround time
2 weeks after receiving the samples
Detection limit
Pg/cm2
Available quality systems
Accredited testing laboratory
Device types

Questions? We're happy to help.

Questions? We're happy to help.

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Have questions or need help? Email us at or call +358 50 336 6128.