Si wafer organic contamination by ATD GC-MS
Automated thermal desorption-gas chromatography-mass spectrometry (ATD-GC-MS) is a highly sensitive method for wafer surface organic contamination analysis, providing low detection limits and a wide range of organic contaminant analysis capabilities.
The analysis can be done following SEMI MF 1982-1103 standard.
- Suitable sample matrices
- Si wafer
- Required sample quantity
- 100mm to 300mm full wafer
- Typical turnaround time
- 2 weeks after receiving the samples
- Detection limit
- Pg/cm2
- Available quality systems
- Accredited testing laboratory
- Device types
- Standard
- Method expert
Semiconductors
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