Si wafer organic contamination by ATD GC-MS
Automated thermal desorption-gas chromatography-mass spectrometry (ATD-GC-MS) is a highly sensitive method for wafer surface organic contamination analysis, providing low detection limits and a wide range of organic contaminant analysis capabilities.
The analysis can be done following SEMI MF 1982-1103 standard.
- Suitable sample matrices
- Si wafer
- Required sample quantity
- 100mm to 300mm full wafer
- Typical turnaround time
- 2 weeks after receiving the samples
- Detection limit
- Pg/cm2
- Available quality systems
- Accredited testing laboratory
- Device types
- Standard
- Method expert
Questions? We're happy to help.
Questions? We're happy to help.
Ask for an offer
Fill in the form, and we'll reply in one business day.
Have questions or need help? Email us at info@measurlabs.com or call our sales team.