Testing services / Si wafer organic contamination by ATD GC-MS

Si wafer organic contamination by ATD GC-MS

Automated thermal desorption-gas chromatography-mass spectrometry (ATD-GC-MS) is a highly sensitive method for wafer surface organic contamination analysis, providing low detection limits and a wide range of organic contaminant analysis capabilities.

The analysis can be done following the SEMI MF 1982-1103 standard.

More information about the method:

GC-MS analysis TD-GC-MS analysis

Suitable sample matrices: Si wafer
Required sample quantity: 100mm to 300mm full wafer
Typical turnaround time: 2 weeks after receiving the samples
Detection limit: Pg/cm2
Available quality systems: Accredited testing laboratory
Device types: GC-MS
Standard: SEMI MF 1982-1103
Method expert: Kamal Mundoli

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info@measurlabs.com

Questions? We're happy to help.

info@measurlabs.com

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