RBS measurement
Rutherford Backscattering Spectrometry (RBS) can be used to measure the composition of solid samples quantitatively at the surface as well as depth profiling.
RBS is used for the analysis of heavy elements and can be combined with ToF-ERDA when lighter elements also need to be analyzed.
Elements with similar mass can be difficult to differentiate.
- Suitable sample matrices
- Thin films, coatings, semiconductors, metals, solid materials
- Required sample quantity
- 10x10-15x15 mm
- Typical turnaround time
- 2 – 4 weeks after receiving the samples
- Detection limit
- 0.1at.% (ppm for heavy elements)
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
Chemicals
Semiconductors
Compositional analysis
Elements and ions
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