Secondary ion mass spectrometry (SIMS)
Secondary ion mass spectrometry (SIMS) is a highly sensitive elemental depth profiling method that can be used for a wide variety of solids to determine the presence of impurities or concentration of dopants.
All elements from hydrogen to uranium can be detected with concentrations in the parts-per-billion (ppb) range. By using standards, SIMS allows for both qualitative and quantitative analysis.
Depth profiling can be done from 10 nm down to a few µm thickness and needs to be done in electronegative or electropositive modes depending on the analyzed elements.
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More information about the method:
Secondary ion mass spectrometry (SIMS)- Suitable sample matrices
- Solids, thin films, bulk materials
- Required sample quantity
- 1x1 cm
- Typical turnaround time
- 2 – 3 weeks after receiving the samples
- Detection limit
- Down to ppm - ppb
- Available quality systems
- Measurlabs validated method
- Device types
- Method expert
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