Thermal conductivity of thin films with TDTR

Thermal conductivity analysis of thin film coatings with thicknesses between 10 nm and 1,000 nm, deposited on a Si substrate. The following measurements and calculations are included within the scope of the service:

  • Time domain thermoreflectance (TDTR) measurements to determine thermal effusivity or thermal diffusivity. Three iterations are taken at different positions.

  • Analytical calculation of the thermal conductivity of the thin film. The customer should disclose the density, specific heat capacity, and thickness of the layer stack, as these parameters are required to perform the calculation. Density and specific heat capacity values can also be taken from the literature.

  • Interfacial thermal resistance can also be determined as part of the service.

Please note that non-metal coatings require a metallic reflection/transducer coating (e.g, Mo, Al, or Pt with a thickness of ~100 nm) for the TDTR measurements to be performed. Samples should preferably be delivered with the coating, but if this is not possible, an Al coating can be applied at the laboratory for an extra fee.

A reference sample (such as D 263®T ECO Schott glass) coated with the same transducer coating should also be provided.

The analysis is performed using a picosecond pulsed light heating thermoreflectance (PicoTR) system with 1 ps resolution and 50 ns observation time. Temperature (RT to 500 °C), atmosphere (N2 or air), and measurement mode (front heating/front detection or rear heating/front detection) can be selected to suit the sample.

Suitable sample matrices
Thin films with thickness > 10 nm and surface roughness (RMS) < 15 nm
Required sample quantity
10 x 10 mm (up to 20 x 20 mm) film stacks with thickness up to 20 mm
Typical turnaround time
2 – 3 weeks after receiving the samples
Available quality systems
Measurlabs validated method

Price

Typical price range (Excl. VAT):
771–1,436 €per sample

We also charge a 97 € service fee per order.

Large batches of samples are eligible for discounts.

Questions? We're happy to help.

Questions? We're happy to help.

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