Spectroscopic ellipsometry

Spectroscopic ellipsometry (SE) is a non-destructive optical technique that is used to determine the thickness of thin films and bulk materials. SE measures the change in reflected polarized light. Measurements can be performed on single and multi-layer films.

Simple pricing model, no hidden fees

Prices excluding VAT.

  • Fast turnaround times
  • Personal service from method experts
  • Competitive prices
  • Result accuracy guarantee

Spectroscopic ellipsometry (SE) is an optical technique that characterizes polarized light reflected from a sample's surface. SE analysis is used to characterize thin film and bulk materials. The film can be a single or multi-layer film with a preferred thickness between 1 nm and 1000 nm (or 1 μm).

The method is based on unpolarized light that is sent through a polarizer allowing only light with a certain electric field orientation to pass through. Linearly polarized light travels to the sample and reflects from the surface as elliptically polarized. Ellipsometry measures two values, amplitude ratio (tan ψ) and the phase difference (Δ), which describe the change in the polarization after the light has interacted with the sample. The method can be used to analyze material properties, such as thickness and refractive index. SE is a nondestructive and noncontact method. It can be used for flat and transparent and semitransparent films.

Suitable sample matrices

  • Transparent and semitransparent samples
  • Thin films
  • Semiconductors
  • Dielectrics
  • Polymers
  • Organic coatings
  • Metal layers

Ideal uses of Spectroscopic ellipsometry

  • Measuring thicknesses of single and multi-layered thin films
  • Measuring optical properties of thin films

Ask for a quote

Contact us below to get a quote for testing services in one business day.

We always reply within one business day.

You can also email us at info@measurlabs.com or call +358 50 336 6128.

Frequently asked questions

What is spectroscopic ellipsometry commonly used for?

Spectroscopic ellipsometry is used to characterize the properties of the thin film and bulk materials, such as thickness and refractive index.

What are the limitations of SE analysis?

The measured film should be optically flat meaning that it reflects light from the surface. Too rough surfaces scatter a beam away from the detector which prevents the ellipsometric measurement. The film must also be transparent or semitransparent so that light can pass through.

The preferred thickness of the sample is between 1nm and 1000nm.

What kind of samples can be analyzed with spectroscopic ellipsometry?

SE can be used for a wide variety of thin films including semiconductors, polymers, dielectrics, and even metal layers.

What is Measurlabs?

Measurlabs offers a variety of laboratory analyses for product developers and quality managers. We perform some of the analyses in our own lab, but mostly we outsource them to carefully selected partner laboratories. This way we can send each sample to the lab that is best suited for the purpose, and offer high-quality analyses with more than a thousand different methods to our clients.

How does the service work?

When you contact us through our contact form or by email, one of our specialists will take ownership of your case and answer your query. You get an offer with all the necessary details about the analysis, and can send your samples to the indicated address. We will then take care of sending your samples to the correct laboratories and write a clear report on the results for you.

How do I send my samples?

Samples are usually delivered to our laboratory via courier. Contact us for further details before sending samples.