VPD-ICP-MS LIKE standard metal analysis, 300 mm samples
Determination of trace metal contamination on ALD thin film surfaces. using VPD-ICP-MS LIKE method. Standard metal analysis includes quantifying of following elements: Li, B, Na, Mg, Al, P, K, Ca, Ti, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ge, As, Y, Mo, Sn, Ba, Ce, Hf, Ta, W, and Pb. Price is for 300 mm wafers.
More information about the method family:Vapour phase decomposition ICP-MS (VPD-ICP-MS)
- Suitable sample matrices
- Thin films, ALD samples
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Accredited testing laboratory
- Method expert
- Price (VAT 0)
- First sample: 823 €
Additional samples: 686 € per sample
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