VPD-ICP-MS LIKE noble metal analysis, 200 mm sample
Determination of trace metal contamination on ALD film surfaces using VPD-ICP-MS. Noble metal analysis includes quantifying of following elements: Ru, Pd, Ag, Pt, and Au. Price is for 200 mm wafer.
More information about the method family:Vapour phase decomposition ICP-MS (VPD-ICP-MS)
- Suitable sample matrices
- Thin films, ALD samples
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Accredited testing laboratory
- Method expert
- Price (VAT 0)
- First sample: 823 €
Additional samples: 686 € per sample
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