VPD-ICP-MS LIKE noble metal analysis, 150 mm sample
Chemical analysis
Elemental analysis
Material testing
Surface testingDetermination of trace metal contamination on ALD film surfaces using VPD-ICP-MS. Noble metal analysis includes quantifying of following elements: Ru, Pd, Ag, Pt, and Au. Price is for 150 mm wafer.
More information about the method family:
Vapour phase decomposition ICP-MS (VPD-ICP-MS)- Suitable sample matrices
- Thin films, ALD samples
- Typical turnaround time
- 3 weeks after receiving the samples
- Quality system
- Accredited testing laboratory
- Method expert
- Price (VAT 0)
- First sample: 776 €
Additional samples: 642 € per sample
Interested in this measurement?
You can order this measurement via online checkout. Just fill in a few details below:
Questions? We're happy to help.
Questions? We're happy to help.
Ordering made easy
1.Order one of our testing services or ask for help.
2.Send us your samples.
3.We measure your materials or products.
4.You receive the test report and the results in your email.