VPD-ICP-MS LIKE noble metal analysis, 100 mm sample

Determination of trace metal contamination on ALD film surfaces using VPD-ICP-MS. Noble metal analysis includes quantifying of following elements: Ru, Pd, Ag, Pt, and Au. Price is for 100 mm wafer.

Suitable sample matrices
Thin films, ALD samples
Typical turnaround time
3 weeks after receiving the samples
Quality system
Accredited testing laboratory
Method expert
Kia Bertula
Kia Bertula
Price (VAT 0)
First sample: 776 €
Additional samples: 641 € per sample

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776 €(VAT 0)

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