Cross-sectional high resolution TEM-EDX imaging + FIB preparation
Cross-sectional high-resolution TEM-EDX with focused ion beam (FIB) preparation is a powerful combination of sample preparation and imaging techniques.
A cross-section of the sample is prepared with a focused ion beam (FIB)
The sample is imaged with a high-resolution transmission electron microscope (HR-TEM)
The elemental composition of the sample is determined using electron dispersive X-ray spectroscopy (EDX).
More information about the method family:TEM Analysis (TEM)Focused ion beam (FIB)Cross-sectional TEM analysis
- Suitable sample matrices
- Solid materials, thin film, silicon wafers, glass substrates, metals, etc.
- Typical turnaround time
- 3 weeks after receiving the samples
- Detection limit
- Quality system
- Measurlabs validated method
- Device types