Secondary ion mass spectrometry (SIMS)

Secondary Ion Mass Spectrometry (SIMS) is a quantitative method to determine the concentration depth profiles of the elements. SIMS can be used for a wide variety of solid-state sample types. Investigations close to the surface set a typical range of 5 nm to 20 µm and a lateral range from 50 µm up to 500 µm. -Often SIMS can determine all elements in the mass range from hydrogen to uran.